Solberg’s WL Series Vacuum Filters are designed for a variety of industrial and semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions. Ideal for medium-high vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system. Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x 10-5 mbar/l/s.
คุณสมบัติ
NW16 – NW40 Flange Connections :
- ISO flange connections
- Seamless drawn housings
- Corrosive resistant carbon steel construction
- Powder coat finish (black models)
- O-ring housing seal
- Stainless steel torsion clips
K100 – K320 Connections :
- ISO-K stainless steel flanges standard
- Machined flange surface to RMS63, uncoated
- High quality vacuum service components
- Corrosive resistant black powder coat carbon steel
- KF10 differential ports for accurate vacuum ΔP readings
- Machined & polished sealing surfaces on ISO flange faces for reliable vacuum performance on all flange types
- K200 housings and larger have domed lid to minimize deflection and increase durability
คุณสมบัติทางเทคนิค
- Rated vacuum leak rate of 1×10-5 mbar/l/sec or better (verified by helium leak test)
- Temp (continuous) : min -15°F (-26°C) max 220°F (104°C)
- Filter change out differential : 28 – 37 Torr over initial ΔP
- Polyester : 99%+ efficiency to 5 micron